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A STUDY ON CRYSTALLINE MORPHOLOGY OF AN AlN THICK FILM GROWN ON THE TRENCH-PARTERNED -Al2O3 USING X-RAY DIFRACTION
Corresponding Author(s) : Dinh Thanh Khan
UED Journal of Social Sciences, Humanities and Education,
Vol. 7 No. 5 (2017): UED JOURNAL OF SOCIAL SCIENCES, HUMANITIES AND EDUCATION
Abstract
The crystalline morphology such as domain texturing, lattice tilting in a thick aluminum nitride (AlN) film grown on a trench-patterned α-Al2O3 template was investigated using X-ray diffraction measurements. The results clearly demonstrated that the trench-patterned template has a strong influence on the crystalline morphology in the thick AlN film. The crystalline morphology is anisotropic between the and directions. The AlN film contains several crystal domains, arranged along the direction and tilted toward each other in this direction but parallel to each other in the direction. These results can be attributed to the influence of the growth mechanism of the AlN film on the trench-patterned α-Al2O3 template and the elastic relaxation of strain along the growth direction.
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