Mai Thi Kieu Lien, Susumu Horita. LOW-TEMPERATURE CRYSTALLIZATION OF AMORPHOUS SILICON THIN FILMS ON BOTTOM GATE ELECTRODES BY USING YSZ CRYSTALLIZATION-INDUCTION LAYER AND SOLID-PHASE CRYSTALLIZATION METHODS. jshe [Internet]. 2016Sep.28 [cited 2024Nov.24];6(3):22-7. Available from: https://jshe.vn/index.php/jshe/article/view/649