Dinh Thanh Khan. SIMULATION OF THERMAL STRAIN IN AlN CRYSTALLINE FILM GROWN ON A TRENCH-PATTERNED AlN/-Al2O3 TEMPLATE USING THE FINITE ELEMENT METHOD. jshe [Internet]. 2016Sep.28 [cited 2024Nov.21];6(3):17-1. Available from: https://jshe.vn/index.php/jshe/article/view/648